Technology

Processing Technology

Nanoshift has a wealth of knowledge and expertise in MEMS, Bio-MEMS, and Nanotechnology process design and fabrication. We are particularly versatile in customization. Below are a few examples of our past projects:

MEMS-Centric Processing:

Nanoshift understands the need to develop specialized processing techniques for the successful development of functional MEMS devices. Critical to MEMS are deep silicon etching and various wafer level bonding process techniques that are different from traditional CMOS process methodology.

Nanoshift has successfully demonstrated its processing know-how in these two areas for various MEMS and Bio-MEMS applications. The image above shows an anodically bonded Pyrex wafer to a Silicon-On-Insulator wafer.

MEMS Sensors and Actuators:

Many MEMS sensors and actuators utilize comb-finger structures to produce mechanical movements. Figure 1 shows a MEMS device using comb-finger structures for actuation, fabricated by Nanoshift.

This particular device was fabricated on a Silicon-on-Insulator substrate. The device is shown after process and release. The structure has a 10:1 aspect ratio, 2mm critical dimension feature size along the comb-finger arrays. Notable are the virtually vertical sidewall profiles with very little undercut.

Our fabrication technology allows us to create such devices with precision and control. We work closely with our clients to develop necessary processes best suited for their needs.

Bio-MEMS Applications:

Nanoshift is well aware of upcoming needs in bio-technology. We have explored some non-conventional processes for Bio-MEMS applications. Figure 2 shows a SEM image of a flow through a single cell analysis chip fabricated by Nanoshift. It uses multiple stacks of photo-sensitive polymers to create a three-dimensional, micro-fluidic structure. The use of such polymers makes rapid prototyping possible. All materials on the chip are bio-compatible.

With our innovative and creative approach, realization of lab-on-a-chip technology for commercialization has become attainable.